Environmental Detect and Control SPM
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Temperature and humidity Sensors
are embedded in CSPM5500 system,
monitor by LED. |
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Temperature |
Humidity |
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Range |
-55～150℃ |
0～100％RH |
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Resolution |
0.01℃ |
0.03％RH |
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Accuracy |
0.1℃ |
0.5％RH |
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Response time |
5000ms |
4000ms |
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Non-linearity |
±0.18℃ |
＜1％RH |
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Long-time stability |
±0.08℃ |
＜1％RH |
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Seal-air System can be employed
to CSPM5500 for Environmental Control SPM. |
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Quartz glass window |
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Specifications:
* alloy seal cab for disturbance isolation
* acrylonitrile-butadiene O-ring for better seal
* Large Quartz glass window for sample board-band ray radiation
* Adjustable lightening device inside for processing monitor
* Air inlet-outlet port for environmental control
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Environmental Control
SPM |
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Sample-heating-stage
System can be employed to CSPM5500 for sample temperature
Control. |
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Diameter |
30mm |
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Power |
6W (Max.) |
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Temperature |
150℃ (Max.) |
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Accuracy |
0.5℃ |
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Sample-heating-stage
System |
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